|
Item |
Parameter |
Item |
Parameter |
|
Optical system |
Infinite optical system |
Focusing mechanism |
Motorized |
|
Viewing head |
Trinocular head （0.3X CCD mount adapter） |
Base |
Marble |
|
Lens in the tube |
Focal distance f=250 mm |
Display divice |
Zero adjust, direction change, data output, TTL signal |
|
Polarizing device |
analyzer can rotate 360。. The polarizer and analyzer can be removed out of optical path. |
||
|
Illumination |
Epi-illumination: 12V/50W Halogen lam. Transmitted illumination: 5W LED. |
||
|
Stage |
Cross travel: XY 200mm×200mm. Measuring method: metrology grating. Resolution: 0.001 mm. Moving function: X/Y. |
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|
Options |
1. 300 mega pixel, 500 mega pixel, 800 mega pixel and 1000 mega pixel CMOS
2. Measuring software
3. Objective: 2X (NA0.055/W.D 34 mm), 100X ( NA0.55/W.D 13 mm)
4. Microscopic spectrometer |
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