|
Item |
Technical data |
Item |
Technical data |
|
Operation modes |
Contact mode, friction mode, extended modes of Tapping, phase, MFM, EFM. |
Scan angle |
Random |
|
Sample size |
Φ≤90mm，H≤20mm |
Sample movement |
0～20mm |
|
Max. scan range |
X/Y: 20 um, Z: 2 um |
Pulse width of approaching motor |
10±2ms |
|
Resolution |
X/Y: 0.2 nm, Z: 0.05nm |
Optical system |
Magnification: 4X, resolution: 2.5 um |
|
Scan rate |
0.6Hz~4.34Hz |
Data points |
256×256，512×512 |
|
Scanning control |
XY: 18-bit D/A, Z: 16-bit D/A |
Feedback type |
DSP digital feedback |
|
Data sampling |
One 14-bit A/D and double 16-bit A/D multiple-channel simultaneously |
Feedback sampling rate |
64.0KHz |
|
PC connection |
USB2.0 |
Windows |
Compatible with Windows98/2000/XP/7/8 |
