|
Item |
Technical data |
Item |
Technical data |
|
Operation modes |
Contact mode, Tapping mode, phase, friction, MFM, EFM |
Scan angle |
0~360 ° |
|
Sample size |
Φ≤90 mm；H≤20 mm |
Sample movement |
0～20 mm |
|
Max. scan range |
X/Y: 50 um, Z: 5 um |
Pulse width of approaching motor |
10±2 ms |
|
Resolution |
X/Y: 0.2 nm, Z: 0.05nm |
Optical system |
magnification: 10X, resolution: 1um |
|
Scan rate |
0.6 Hz~4.34 Hz |
Data points |
256×256，512×512 |
|
Scanning control |
XY: 18-bit D/A, Z: 16-bit D/A |
Feedback type |
DSP digital feedback |
|
Data sampling |
One 14-bit A/D and double 16-bit A/D multiple-channel simultaneously |
Feedback sampling rate |
64.0KHz |
|
PC connection |
USB2.0 |
Windows |
Compatible with Windows98/2000/XP/7/8 |
